SJ 2797-1987電子級(jí)氬
本標(biāo)準(zhǔn)適用于半導(dǎo)體材料、分立器件和集成電路生產(chǎn)工藝過(guò)程中使用的電子級(jí)氬、按其使用要求電子級(jí)氬分為兩級(jí)，代號(hào)為：電子 Ⅰ級(jí)氬代號(hào)為：DZAr-Ⅰ ; Ⅱ級(jí)氬代號(hào)為：DZAr- Ⅱ
名稱：填充柱
材質(zhì)：不銹鋼
固定相：高分子小球
規(guī)格：2m*3mm
型號(hào)：GDX-104
粒度：60-80目
應(yīng)用：安捷倫6890,7820,7890,8860,8890；賽默飛1310，島津GC-2014，GC-2010，GC-2030，賽默飛1310，布魯克，PE，磐諾，天瑞，天美，福立，川儀，北分瑞利，魯南瑞虹
分離：電子級(jí)氬中痕量的甲烷的含量
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SJ 2797-1987 Electronic Grade Argon
This standard applies to electronic grade argon used in the production process of semiconductor materials, discrete devices, and integrated circuits. Electronic grade argon is divided into two levels according to its usage requirements, with the code being: Electronic Grade I Argon and the code being DZAr - I; Grade II argon code: DZAr - II
Name: Filler Column
Material: Stainless steel
Fixed phase: polymer spheres
Specification: 2m * 3mm
Model: GDX-104
Particle size: 60-80 mesh
Application: Agilent 689078207890886088890; Thermo Fisher 1310, Shimadzu GC-2014, GC-2010, GC-2030, Thermo Fisher 1310, Brooke, PE, Panno, Tianrui, Tianmei, Fuli, Chuanyi, Beifen Ruili, Lunan Ruihong
Separation: Trace methane content in electronic grade argon
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