色譜柱：內(nèi)徑4mm，長度1m，5A分子篩柱80-100目
*高使用溫度：320°C
適用于；安捷倫6890；7820,7890,8860,8890；島津GC14C，GC-2010，GC-2014，GC-2030，布魯克，PE，瓦里安，磐諾，福立，華愛，天瑞，天美，川儀，東西電子，北分瑞利
分離：氫，氧，氮，一氧化碳，甲烷，永jiu氣體
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本標準適用于半導體材料、分立器件和集成電路生產(chǎn)工藝過程中使用的電子級氬、按其使用要求電子級氬分為兩級，代號為：電子 Ⅰ級氬代號為：DZAr-Ⅰ ; Ⅱ級氬代號為：DZAr- Ⅱ
SJ 2797-1987電子級氬
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Chromatography column: inner diameter 4mm, length 1m, 5A molecular sieve column 80-100 mesh
*High operating temperature: 320 ° C
Applicable to; Agilent 6890; 7820,7890,8860,8890； Shimadzu GC14C, GC-2010, GC-2014, GC-2030, Brooke, PE, Varian, Panno, Fuli, Huaai, Tianrui, Tianmei, Chuanyi, Dongxi Electronics, Beifen Ruili
Separation: Hydrogen, Oxygen, Nitrogen, Carbon Monoxide, Methane, Permanent Gas
This standard applies to electronic grade argon used in the production process of semiconductor materials, discrete devices, and integrated circuits. Electronic grade argon is divided into two levels according to its usage requirements, with the code being: Electronic Grade I Argon and the code being DZAr - I; Grade II argon code: DZAr - II
SJ 2797-1987 Electronic Grade Argon
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