多晶硅是太陽能光伏行業(yè)的基礎材料，其主要生產(chǎn)工藝是改良西門子法(即三氯氫硅還原法，SiHCl3+H2 — Si+3HC1),該工藝使用的主要設備多晶硅還原爐就是鐘罩式化學氣相沉積爐。
浩瀚色譜（山東）應用技術開發(fā)有限公司，采用氣相色譜法20%填充柱，多晶硅還原尾氣中的氯化氫的檢測，實現(xiàn)了多晶硅還原爐內(nèi)尾氣中的氯化氫含量的在線檢測，對于還原爐排出的尾氣中的氯化氫的含量檢測準確，檢測速度快，檢測結(jié)果的反饋速度快。
名稱：不銹鋼填充柱
固定液：20%二甲基聚硅氧烷
擔體：Chromosorb W AW DMCS80-100mesh
型號：OV-101
應用：T/CNIA 0016-2019多晶硅用回收氫氣中氯化氫,氮氣,氧氣,總碳含量的氣相色譜測定
適用于賽默飛1310系列；島津GC-14C，GC-2010，GC-2014，GC-2030
Polycrystalline silicon is the basic material of the solar photovoltaic industry, and its main production process is the improved Siemens method (i.e. trichlorosilane reduction method, SiHCl3+H2 — Si+3HC1), The main equipment used in this process is the bell jar type chemical vapor deposition furnace for polycrystalline silicon reduction.
Haohan Chromatography (Shandong) Application Technology Development Co., Ltd. uses gas chromatography with a 20% packed column to detect hydrogen chloride in the tail gas of polycrystalline silicon reduction, achieving online detection of hydrogen chloride content in the tail gas of polycrystalline silicon reduction furnace. The detection of hydrogen chloride content in the tail gas discharged from the reduction furnace is accurate, fast, and the feedback speed of the detection results is fast.
Name: Stainless Steel Filled Column
Fixed liquid: 20% dimethyl polysiloxane
Carrier: Chromosorb W AW DMCS80-100 mesh
Model: OV-101
Application: Gas Chromatography Determination of Hydrogen Chloride, Nitrogen, Oxygen, and Total Carbon Content in Recycled Hydrogen for Polycrystalline Silicon (T/CNIA 0016-2019)
Applicable to the Thermo Fisher 1310 series; Shimadzu GC-14C, GC-2010，GC-2014，GC-2030
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