硅烷/氮?dú)饣旌蠚獬Ｒ娪猛荆?/p>
1、硅烷在半導(dǎo)體工業(yè)中主要用于制作高純多晶硅、通過氣相淀積制作二氧化硅薄膜、氮化硅薄膜、多晶硅隔離層、多晶硅歐姆接觸層和異質(zhì)或同質(zhì)硅外延生長(zhǎng)原料、以及離子注入源和激光介質(zhì)等，還可用于制作太陽能電池、光導(dǎo)纖維和光電傳感器等。
2、除了光伏產(chǎn)業(yè)外，還有很多制造工廠需要用到硅烷氣，如平板顯示器、半導(dǎo)體、甚至鍍膜玻璃生產(chǎn)廠。
名稱：填充柱
固定相：高分子小球
規(guī)格：5m*2mm
型號(hào)：Porapak Q
應(yīng)用：HGT 5895-2022工業(yè)用混合氣體 硅烷/氮?dú)?nbsp;
浩瀚色譜（山東）應(yīng)用技術(shù)開發(fā)有限公司,采用氣相色譜法，熱導(dǎo)檢測(cè)器，PQ填充柱，校正歸一法測(cè)定工業(yè)用混合氣體 硅烷/氮?dú)?，柱效高，分離好，結(jié)果滿意。
Common uses of silane/nitrogen mixture:
1. In the semiconductor industry, silane is mainly used to produce high-purity polysilicon, silicon dioxide film, silicon nitride film, polysilicon isolation layer, polysilicon ohmic contact layer and heterogenous or homogeneous silicon epitaxial growth materials, as well as ion implantation sources and laser media, and also can be used to produce solar cells, optical fibers and photoelectric sensors.
2. In addition to the photovoltaic industry, there are many manufacturing plants that need to use silane gas, such as flat panel displays, semiconductors, and even coated glass manufacturers.
Name: Filled Column
Stationary phase: polymer pellet
Specification: 5m * 2mm
Model: Porapak Q
Application: HGT 5895-2022 industrial mixed gas silane/nitrogen
Haohan Chromatography (Shandong) Applied Technology Development Co., Ltd. uses gas chromatography, thermal conductivity detector, PQ packed column, and calibration normalization method to determine industrial mixed gas silane/nitrogen, with high column efficiency, good separation and satisfactory results.
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